Fundamentals of semiconductor manufacturing and process control (notice n° 7670)
| 000 -LEADER | |
|---|---|
| fixed length control field | 02926nam a2200277 u 4500 |
| 001 - CONTROL NUMBER | |
| control field | UNI0000315 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20161123112106.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 131120s2006 XX eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0471784060 (hardcover) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780471784067 (hardcover) |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | DCLC |
| 040 ## - CATALOGING SOURCE | |
| Modifying agency | IMIST |
| Description conventions | AFNOR |
| 041 1# - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Edition number | 22 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | May, Gary S. |
| 245 #0 - TITLE STATEMENT | |
| Title | Fundamentals of semiconductor manufacturing and process control |
| Statement of responsibility, etc | Gary S. May, Costas J. Spanos. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 1st ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | [S.l.] |
| Name of publisher, distributor, etc | Wiley-IEEE Press |
| Date of publication, distribution, etc | 2006. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 463 p. |
| Dimensions | 24 cm. |
| 500 ## - GENERAL NOTE | |
| General note | A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields. The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and management of overall manufacturing systems * Chapters include case studies, sample problems, and suggested exercises * Instructor support includes electronic copies of the figures and an instructor's manual Graduate-level students and industrial practitioners will benefit from the detailed exami?nation of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment. An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department. An Instructor Support FTP site is also available. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Integrated circuits--Design and construction |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Process control--Statistical methods |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductors |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductors--Design and construction |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Spanos, Costas J. |
| Withdrawn status | Lost status | Damaged status | Not for loan | Permanent Location | Current Location | Date acquired | Inventory number | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
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| La bibliothèque des sciences de l'ingénieur | La bibliothèque des sciences de l'ingénieur | 14904 | 621.381 52 MAY | 0000000017870 | 11/23/2016 | 11/23/2016 | Livre |