Handbook of silicon semiconductor metrology /
Publié par : Marcel Dekker, (New York :) Détails physiques : xvi, 874 pages : illustrations ; 27 cm ISBN :0824705068; 9780824705060; 0203904540; 9780203904541.
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Semiconductors
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Inspection.
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Semiconducteurs
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Mesure.
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Semiconducteurs
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Inspection.
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Halbleitertechnologie.
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Metrologie.
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Silicium.
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Semiconducteurs - Inspection.
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Semiconducteurs - Mesure.
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Halbleitertechnologie.
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Metrologie.
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Silicium.
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Publisher description
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http://marc.crcnetbase.com/ISBN/9780203904541
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Includes bibliographical references and index.
1. Silicon Semiconductor Metrology / Alain C. Diebold -- 2. Gate Dielectric Metrology / Clive Hayzelden -- 3. Metrology for Ion Implantation / Lawrence A. Larson -- 4. MOS Device Characterization / Eric M. Vogel and Veena Misra -- 5. Carrier Illumination Characterization of Ultra-Shallow Implants / Peter Borden, Laurie Bechtler and Karen Lingel / [and others] -- 6. Modeling of Statistical Manufacturing Sensitivity and of Process Control and Metrology Requirements for a 0.18-[mu]m NMOSFET / Peter M. Zeitzoff -- 7. Overview of Metrology for On-Chip Interconnect / Alain C. Diebold -- 8. Metrology for On-Chip Interconnect Dielectrics / Alain C. Diebold, William W. Chism and Thaddeus G. Dziura / [et al.].
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