TY  - BOOK
AU  - Gusev,Evgeni
AU  - Dideikin,Arthur
AU  - Garfunkel,Eric
TI  - Advanced materials and technologies for micro/nano-devices, sensors and actuators
T2  - Nato science for peace and security series B: physics and biophysics
SN  - 9048138051 (hardcover)
U1  - 621.381 22
PY  - 2010///
CY  - [S.l.]
PB  - Springer
KW  - Chemistry
KW  - Engineering
KW  - Mechanical engineering
KW  - Mechanics
KW  - Microelectromechanical systems--Design and construction
KW  - Microreactors
KW  - Microwaves
KW  - Nanotechnology
N1  - The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies
ER  -