TY  - BOOK
AU  - Stepanova,Maria
AU  - Dew,Steven
TI  - Nanofabrication: Techniques and principles
SN  - 9783709104231 (hbk. : alk. paper)
U1  - 620.5 22
PY  - 2012///
CY  - Wien, New York
PB  - Springer
KW  - Nanomanufacturing
KW  - Nanostructures
KW  - Biosensors
KW  - Nanotechnologie
N1  - Includes bibliographical references
ER  -