TY  - BOOK
AU  - Geng,,Hwaiyu
TI  - Semiconductor manufacturing handbook
T2  - Mcgraw-hill handbooks
SN  - 0071445595
U1  - 621.38152 
PY  - 2005///
CY  - [S.l.]
PB  - McGraw-Hill Professional
KW  - Electrical engineering
KW  - Semi-conductors & super-conductors
KW  - Integrated circuits - Design and construction - Handbooks, manuals, etc
KW  - Semiconductors - Design and construction - Handbooks, manuals, etc
KW  - Technology & Engineering
KW  - Technology & Industrial Arts
KW  - Science/Mathematics
KW  - Electronics - Semiconductors
KW  - Manufacturing
KW  - TECHNOLOGY / Electronics / Semiconductors
KW  - Technology & Engineering / Electronics / Semiconductors
KW  - Technology & Engineering / Manufacturing
KW  - Design and construction
KW  - Handbooks, manuals, etc
KW  - Integrated circuits
KW  - Semiconductors
KW  - Electronics Engineering & Communications Engineering
N1  - This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines
ER  -