Bibliothèque de L'IMIST/CNRST

"Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfection is an important goal for many applications in nanotechnology. As ALD is one of the important techniques which offers good control over the surface structures created, it is more and more in the focus of scientists. The book is structured in such a way to fi t both the need of the expert reader (due to the systematic presentation of the results at the forefront of the technique and their applications) and the ones of students and newcomers to the fi eld (through the first part detailing the basic aspects of the technique)."--Pub. desc.

Includes bibliographical references and index.

1 Theoretical Modeling of ALD Processes / Charles B. Musgrave -- 2 Step Coverage in ALD / Sovan Kumar Panda and Hyunjung Shin -- 3 Precursors for ALD Processes / Matti Putkonen -- 4 Sol-Gel Chemistry and Atomic Layer Deposition / Guylhaine Clavel, Catherine Marichy, and Nicola Pinna -- 5 Molecular Layer Deposition of Hybrid Organic-Inorganic Films / Steven M. George [and others] -- 6 Low-Temperature Atomic Layer Deposition / Jens Meyer and Thomas Riedl -- 7 Plasma Atomic Layer Deposition / Erwin Kessels, Harald Profijt, Stephen Potts, and Richard van de Sanden -- 8 Atomic Layer Deposition for Microelectronic Applications / Cheol Seong Hwang -- 9 Nanopatterning by Area-Selective Atomic Layer Deposition / Han-Bo-Ram Lee and Stacey F. Bent -- 10 Coatings on High Aspect Ratio Structures / Jeffrey W. Elam -- 11 Coatings of Nanoparticles and Nanowires / Hong Jin Fan and Kornelius Nielsch -- 12 Atomic Layer Deposition on Soft Materials / Gregory N. Parsons -- 13 Application of ALD to Biomaterials and Biocompatible Coatings / Mato Knez -- 14 Coating of Carbon Nanotubes / Catherine Marichy, Andrea Pucci, Marc-Georg Willinger, and Nicola Pinna -- 15 Inverse Opal Photonics / Davy P. Gaillot and Christopher J. Summers -- 16 Nanolaminates / Adriana V. Szeghalmi and Mato Knez -- 17 Challenges in Atomic Layer Deposition / Markku Leskelä.