Handbook of compound semiconductors : growth, processing, characterization, and devices /
Collection : Materials science and process technology series. Electronic materials and process technology Détails physiques : 1 online resource (xxii, 914 pages) : illustrations. ISBN :1591240808 (electronic bk.); 9781591240808 (electronic bk.); 9780815513742; 0815513747; 9780815517436 (electronic bk.); 0815517432 (electronic bk.).This book reviews the advances and technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides an overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, et cetera.
Includes bibliographical references and index.
Bulk Crystal Growth -- MOCVD of Compound Semiconductor Layers -- Molecular Beam Epitaxy -- Physical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related Materials -- Surface Processing of III-V Semiconductors -- Ion Implantation Induced Extended Defects in GaAs -- Passivation of GaAs and InP -- Wet and Dry Etching of Compound Semiconductors -- Rapid Isothermal Processing (RIP) -- Epitaxial Lift-Off for Thin Film Compound Semiconductor Devices -- Packaging -- Chemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by X-ray Photoelectron Spectroscopy and Diffraction Techniques -- Characterization of Compound Semiconductor Material by Ion Beams -- Optical Characterization of Compound Semiconductors -- Gallium Arsenide Microelectronic Devices and Circuits -- Optoelectronic Devices -- Acknowledgments -- References -- Index.
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