Semiconductor safety handbook : safety and health in the semiconductor industry /
Collection : Semiconductor safety series Détails physiques : 1 online resource (xxiv, 610 pages) : illustrations. ISBN :1591241510 (electronic bk.); 9781591241515 (electronic bk.); 9780815514183; 0815514182.
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Integrated circuits
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Design and construction
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Safety measures.
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Electronic books.
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Electronic books.
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Integrated circuits
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Design and construction
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Safety measures.
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Semiconductor industry
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Safety measures.
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United States.
Includes bibliographical references and index.
The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH and S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH and S in the semiconductor industry.
Description based on print version record.
Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies -- Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention -- Chemical Hazards in Semiconductor Operations -- Industrial Hygiene -- Electrical Hazards -- Radiation Safety -- Recognition, Evaluation and Control of Some Plasma Processing Hazards -- Fire Protection Technology for Semiconductor Operations -- Building and Fire Codes Impacting the Semiconductor Industry -- Gases and Gas Equipment -- Toxic Gas Monitoring -- References -- Index.
Use copy Restrictions unspecified star MiAaHDL
Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. MiAaHDL
http://purl.oclc.org/DLF/benchrepro0212
digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
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